Fimes Corporation Lifting Stage
This product is compatible with vacuum applications and can be delivered with cleanroom specifications.
The lifting stage is compatible with vacuum conditions. It can also be delivered in a clean room specification. The stroke is 16mm, the positioning accuracy is 2μm, and the vertical force/replacement ratio is 1:3. Additionally, the straightness/flatness is ±2μm, the maximum feed speed is 20mm/s, the maximum acceleration is 200mm/s squared, the maximum load is Z: 30N, and the weight is 4.5kg. For more details, please contact us or refer to the catalog.
- Company：翔栄システム
- Price：Other
